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NJ501-1340

NJ-series NJ501 SECS/GEM CPU Unit

NJ501-1340

The NJ501 SECS/GEM CPU Unit is a NJ-series machine automation controller, and has built-in the SECS/GEM communications functions which are the standards in the semiconductor industry. It is the high-performance controller that fuses machine control and host communications.

about this Product Family

General Specifications

Refer to the data sheet of the Machine Automation Controller NJ/NX-Series for the specifications common for NJ-series NJ501 CPU Units.

Performance Specifications

Refer to specification for NJ501-[]3[]0 in the data sheet of the Machine Automation Controller NJ/NX-Series for the specifications common for NJseries NJ501 CPU Units.

Functional Specifications

Refer to specification for NJ501-[][][][] in the data sheet of the Machine Automation Controller NJ/NX-Series for the specifications common for NJ-series NJ501 CPU Units.

Functions Supported Specifically with NJ501-1340

Besides functions of the NJ501-1300, functions supported by the NJ501-1340 are as follows.

Item Description
Supported port Built-in EtherNet/IP port
Supported standard
*1
The Unit conforms to the following SEMI standards:
E37-0303, E37.1-0702, E5-0707, and E30-0307
Fundamental GEM
requirement
State Model, Equipment Processing State, Host-initiated S1, F13/F14 Scenario, Event Notification,
On-Line Identification, Error Message, Control (Operator Initiated), Documentation
Additional GEM
capability
Establish Communications, Dynamic Event Report Configuration, Variable Data Collection, Trace
Data Collection, Status Data Collection, Alarm Management, Remote Control, Equipment Constant,
Process Recipe Management *1, Material Movement, Equipment Terminal Service, Clock, Limit
Monitoring, Spooling *2, Control (Host Initiated)
User-defined
message
You can create non-GEM compliant communications messages and have host communications.
GEM specific
instruction
The Unit supports 29 instructions to perform the following:
• Changing the GEM Service status.
• Setting HSMS communications.
• Reporting events and reporting alarms.
• Acknowledging host commands and enhanced remote commands.
• Changing equipment constants.
• Uploading and downloading process programs.
• Sending and acknowledging equipment terminal messages.
• Requesting to change time.
• Sending user-defined messages.
• Getting SECS communications log.
GEM Service log *2 Can record the following information.
• HSMS communications log: Keeps log of HSMS communications operations.
• SECS message log: Keeps log of SECS-II communications messages.
• Execution log: Keeps log of executions of GEM instructions.
Shutting down the
GEM Service
Saves the spool data and GEM Service log records into an SD Memory Card and ends the GEM
Service.

*1 E42 recipes, large process programs, and E139 recipes are not supported.
*2 The capability is not available when no SD Memory Card is mounted.

Conformance to Fundamental GEM Requirements and Additional Capabilities

Fundamental GEM requirements GEM-compliant
State Model Yes
Equipment Processing State
Host-initiated S1, F13/F14 Scenario
Event Notification
On-Line Identification
Error Message
Control (Operator Initiated)
Documentation

Additional capabilities GEM-compliant
Establish Communications Yes
Dynamic Event Report Configuration
Variable Data Collection
Trace Data Collection
Status Data Collection
Alarm Management
Remote Control
Equipment Constant
Process Recipe Management Process program: Yes
E42 recipes: No
E139 recipes: No
Material Movement Yes
Equipment Terminal Service
Clock
Limit Monitoring
Spooling
Control (Host Initiated)

Unit Version

Unit Model Unit version
NJ-series SECS/GEM CPU Unit NJ501-1340 Ver.1.09 or later

Unit Versions, GEM Service Versions and Corresponding Sysmac Studio Versions

Unit version of CPU Unit Corresponding version of Sysmac Studio Version of GEM Service
Ver.1.12 Ver.1.16 Ver.1.01
Ver.1.11 Ver.1.15
Ver.1.10 Ver.1.14
Ver.1.13
Ver.1.12
Ver.1.00
Ver.1.09 Ver.1.11