The mounting position is set with a pedestal.
Wafer-carrier Mounting Photomicrosensors
about this Product Family
last update: December 19, 2013
The mounting position is set with a pedestal.
The contact surface with the wafer carrier uses a special chemical-resistant fluororesin.
The unique optical system enables stable detection of almost all wafer-carriers.
Light modulation effectively reduces external light interference.
Utilizes talc-free clean cables.
last update: December 19, 2013