Detects Glass Substrates in Vacuum Chambers

Case Number 48

last update: November 4, 2009

This application uses a Photoelectric Sensor to detect transparent objects, including glass wafers.Through a view port, this Sensor can detect glass wafers that travel in a vacuum chamber. We used optical and circuit technology that detect minute signal differences of transparent glass.

Know-How

Conventional retroreflective photoelectric sensors could not provide stable detection of transparent glass with minute light attenuation.

Benefit / Efficiency

Our optimized optical and circuit technology provides stable detection of transparent glass.

Industry

Semiconductors / Electronics
Work / Process

Presence Detection, Identification
Product Category

Photoelectric Sensors

Use Products

Transparent Object Detection Sensor E3S-R

Ideal for Detecting Glass Wafers and Other Transparent Objects

About this Application Case

Inquiry of this case

Applications

Industry
- Semiconductors / Electronics
  - Detects Glass Substrates in Vacuum Chambers

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