Building Automation
Industrial Automation
Power Automation & Safety
Bangladesh Distributor
Detects Wafers in Vacuum Conveyance Systems
Case Number 45
last update: April 13, 2015
This application uses a Vacuum Fiber Sensor that can be used under a high vacuum.
This Sensor can be used under a 10-5Pa vacuum. The Sensor has 1-channel and 4-channel flange system that you can combine according to the number of Sensors.
This Sensor can be used under a 10-5Pa vacuum. The Sensor has 1-channel and 4-channel flange system that you can combine according to the number of Sensors.
Know-How
Sensors that could be used in a vacuum chamber were not available, which prevented you from detecting the presence of wafers.
Benefit / Efficiency
A Fiber Sensor that can be used in a vacuum chamber enables detecting the presence of wafers even in a 10-5Pa vacuum environment.
Applied Models
E32-V + E3NX-FA
Applied Models
E32-V + E3NX-FA
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- Industry
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Semiconductors / Electronics
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- Work / Process
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Presence Detection, Identification
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- Product Category
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Fiber Sensors
Use Products
Fiber Sensors
E32 Series
OMRON's Fiber Sensors continue to support an increasing range of applications.
About this Application Case
Related Contents
- Fiber Sensors
Applications
- Industry
- Semiconductors / Electronics
- Detects Wafers in Vacuum Conveyance Systems
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