Building Automation
Industrial Automation
Power Automation & Safety
Bangladesh Distributor
RFIDs for Reticle Management
Case Number 210
last update: April 19, 2011
RFID Tags (IC tags) that are attached to pods that hold reticles simplify the confirmation and management of internal reticles.
Know-How
RFID Tags (IC tags) that are attached to pods manage individual pod information and internal reticle information.
Benefit / Efficiency
The internal reticle is checked and identified with the information in the RFID Tag (IC tag) that is attached to the pod. This eliminates the need for communications between stepper and stocker, which simplifies the management system.
Physical objects (the pods) and information (reticle IDs) can be handled together, so there are no racking errors.
Physical objects (the pods) and information (reticle IDs) can be handled together, so there are no racking errors.
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- Industry
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Semiconductors / Electronics
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- Work / Process
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Control
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- Product Category
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RFID Systems
Use Products
RFID System (Conforms to SEMI standard, Electromagnetic Inductive 134 kHz)
V640 Series
Line-up Ethernet I/F model newly. RFID system for Semiconductor applications, supports reading and writing TI (Texas Instruments) transponders
About this Application Case
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Applications
- Industry
- Semiconductors / Electronics
- RFIDs for Reticle Management
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